发明名称 Photosensitive resin composition, photosensitive element using the same, method for producing resist pattern, and method for producing printed wiring board
摘要 The present invention provides a photosensitive resin composition for laser scanning exposure, which satisfies the following formula (1): <maths id="MATH-US-00001" num="00001"> <MATH OVERFLOW="SCROLL"> <MTABLE> <MTR> <MTD> <MROW> <MROW> <MO>-</MO> <MN>25</MN> </MROW> <MO><=</MO> <MROW> <MFRAC> <MROW> <MSUB> <MI>E</MI> <MN>1</MN> </MSUB> <MO>-</MO> <MSUB> <MI>E</MI> <MN>0</MN> </MSUB> </MROW> <MSUB> <MI>E</MI> <MN>0</MN> </MSUB> </MFRAC> <MO>x</MO> <MN>100</MN> </MROW> <MO><=</MO> <MN>25</MN> </MROW> </MTD> <MTD> <MROW> <MO>(</MO> <MN>1</MN> <MO>)</MO> </MROW> </MTD> </MTR> </MTABLE> </MATH> </MATHS> wherein E<SUB>0 </SUB>represents an exposure amount in mJ/cm<SUP>2 </SUP>at which the photosensitive resin composition is cured at the 21st step of the density 1.00 of a 41-step step tablet having a density range from 0.00 to 2.00, a density step of 0.05, a tablet size of 20 mmx187 mm and a step size of 3 mmx12 mm, by irradiation with a full wavelength active light of a high pressure mercury lamp and E<SUB>1 </SUB>represents an exposure amount in mJ/cm<SUP>2 </SUP>at which the photosensitive resin composition after being left for 2 hours under 40 W non-ultraviolet white lamp is cured at the 21st step of the 41-step step tablet by irradiation with a full wavelength active light from a high pressure mercury lamp.
申请公布号 US7220533(B2) 申请公布日期 2007.05.22
申请号 US20030239427 申请日期 2003.01.02
申请人 HITACHI CHEMICAL CO., LTD. 发明人 MURAKAMI YASUHARU;HIDAKA TAKAHIRO
分类号 G03C1/73;C08F2/48;G03F7/004;G03F7/029;G03F7/031;G03F7/033;G03F7/038;G03F7/30;G03F7/36 主分类号 G03C1/73
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