发明名称 |
Substrate, semiconductor device, method of manufacturing substrate, and method of manufacturing semiconductor device |
摘要 |
A substrate for mounting an optical element having a light emission/reception part is disclosed. The substrate includes a base material and an optical waveguide penetrating through the base material. The optical waveguide is positioned opposite to the light emission/reception part. The base material is formed of silicon.
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申请公布号 |
US7221816(B2) |
申请公布日期 |
2007.05.22 |
申请号 |
US20050181116 |
申请日期 |
2005.07.14 |
申请人 |
SHINKO ELECTRIC INDUSTRIES CO., LTD. |
发明人 |
MURAYAMA KEI |
分类号 |
G02B6/26;G02B6/36;G02B6/42;H01L31/0232;H01S5/022 |
主分类号 |
G02B6/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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