发明名称 Substrate, semiconductor device, method of manufacturing substrate, and method of manufacturing semiconductor device
摘要 A substrate for mounting an optical element having a light emission/reception part is disclosed. The substrate includes a base material and an optical waveguide penetrating through the base material. The optical waveguide is positioned opposite to the light emission/reception part. The base material is formed of silicon.
申请公布号 US7221816(B2) 申请公布日期 2007.05.22
申请号 US20050181116 申请日期 2005.07.14
申请人 SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 MURAYAMA KEI
分类号 G02B6/26;G02B6/36;G02B6/42;H01L31/0232;H01S5/022 主分类号 G02B6/26
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