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发明名称
ANNULAR RECEPTACLE FOR A ROTATING CARRIER
摘要
申请公布号
KR100721222(B1)
申请公布日期
2007.05.22
申请号
KR20020058270
申请日期
2002.09.26
申请人
发明人
分类号
H01L21/306;H01L21/3063;H01L21/00;H01L21/304
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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