METHOD FOR THE DEPOSITION OF A FILM BY CVD OR ALD,申请号KR20060113399-传众专利搜索

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发明名称	METHOD FOR THE DEPOSITION OF A FILM BY CVD OR ALD
摘要
申请公布号	KR20070052226(A)	申请公布日期	2007.05.21
申请号	KR20060113399	申请日期	2006.11.16
申请人	ASM INTERNATIONAL N.V.	发明人	ANTTI H. RAHTU
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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