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发明名称
CLEANING MECHANISM OF ROTATION ROLLER AND CLEANING METHOD OF ROTATION ROLLER
摘要
申请公布号
KR20070052220(A)
申请公布日期
2007.05.21
申请号
KR20060113115
申请日期
2006.11.16
申请人
TOKYO ELECTRON LIMITED
发明人
TSUYOSHI YAMASAKI;MASATAKA SAKAI
分类号
H01L21/304;H01L21/027
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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