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发明名称
THROTTLE VALVE FOR PRESSURE CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20070052154(A)
申请公布日期
2007.05.21
申请号
KR20050109868
申请日期
2005.11.16
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM
分类号
H01L21/205;H01L21/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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