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发明名称
WAFER SLIP-OUT SENSING APPARATUS OF CHEMICAL MECHANICAL POLISHING EQUIPMENT FOR WAFER
摘要
申请公布号
KR100721755(B1)
申请公布日期
2007.05.18
申请号
KR20060051352
申请日期
2006.06.08
申请人
DOOSAN DND CO., LTD.
发明人
AN, YOUNG DUCK;SHIN, YONG SUN
分类号
H01L21/304;H01L21/02
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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