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发明名称
CHAMBER COVER HAVING IMPROVED SEALING PERFOMANCE BY AIR PRESSURE
摘要
申请公布号
KR20070051552(A)
申请公布日期
2007.05.18
申请号
KR20050109262
申请日期
2005.11.15
申请人
KORNIC SYSTEMS CORP.
发明人
LEE, JIN YONG;NAM, WON SIK;YEON, JUNG RYUN;JUNG, KI RO;KIM, DOH HOON;YANG, SANG HEE
分类号
H01L21/20;H05B33/10
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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