发明名称 NANO-POSITIONING ELECTROMAGNETIC LINEAR ACTUATOR
摘要 <p>A flexure for an electromagnetic nano-positioning linear actuator having a support and an actuating body, the flexure comprising: a first resilient end for attaching to the support; a second resilient end for attaching to the actuating body; and a substantially rigid intermediate portion located between the first resilient end and the second resilient end.</p>
申请公布号 WO2007055656(A1) 申请公布日期 2007.05.18
申请号 WO2006SG00311 申请日期 2006.10.23
申请人 AGENCY FOR SCIENCE, TECHNOLOGY & RESEARCH;TEO, TAT JOO;YANG, GUILIN 发明人 TEO, TAT JOO;YANG, GUILIN
分类号 B82B3/00;B23Q1/34;H02K41/02 主分类号 B82B3/00
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