发明名称 |
NANO-POSITIONING ELECTROMAGNETIC LINEAR ACTUATOR |
摘要 |
<p>A flexure for an electromagnetic nano-positioning linear actuator having a support and an actuating body, the flexure comprising: a first resilient end for attaching to the support; a second resilient end for attaching to the actuating body; and a substantially rigid intermediate portion located between the first resilient end and the second resilient end.</p> |
申请公布号 |
WO2007055656(A1) |
申请公布日期 |
2007.05.18 |
申请号 |
WO2006SG00311 |
申请日期 |
2006.10.23 |
申请人 |
AGENCY FOR SCIENCE, TECHNOLOGY & RESEARCH;TEO, TAT JOO;YANG, GUILIN |
发明人 |
TEO, TAT JOO;YANG, GUILIN |
分类号 |
B82B3/00;B23Q1/34;H02K41/02 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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