METHOD OF FORMING SUPPORTS BEARING FEATURES, SUCH AS LITHOGRAPHY MASKS

摘要

To manufacture a support made of at least one predetermined material and bearing features: * a plurality of superposed layers (1 to 4) is produced on a substrate that it is known how to remove, each of the layers being formed from zones of at least two different materials, the geometry of the zones and the constituent materials of these superposed layers being defined so as to form said features, on the reverse side of the substrate, these features being of 3D type, and some of these features differing in height among themselves and/or with other features; * a layer of the predetermined material is produced on this multilayer stack; and * at least the substrate is eliminated whereby, after inversion, said support with said features is obtained.