发明名称 |
SHOWER PLATE AND PLASMA TREATMENT APPARATUS USING SHOWER PLATE |
摘要 |
<p>This invention provides a shower plate (31) for plasma treatment formed of a plurality of pipings. The shower plate comprises piping (31A3) comprising a porous material member (44), which is disposed along the piping and has a predetermined porosity to a raw material gas and is convexed to the outside, and a metallic member (41) which is disposed so as to face the porous material member (44) and, together with the porous material member (44), constitutes a raw material gas flow passage (43). According to the above constitution, a nozzle structure, which can release the raw material gas in a divergent form, can be realized.</p> |
申请公布号 |
WO2007055185(A1) |
申请公布日期 |
2007.05.18 |
申请号 |
WO2006JP322136 |
申请日期 |
2006.11.07 |
申请人 |
TOHOKU UNIVERSITY;TOKYO ELECTRON LIMITED;OHMI, TADAHIRO;MATSUOKA, TAKAAKI |
发明人 |
OHMI, TADAHIRO;MATSUOKA, TAKAAKI |
分类号 |
H01L21/31;C23C16/455;H01L21/3065 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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