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经营范围
发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER
摘要
申请公布号
KR20070051914(A)
申请公布日期
2007.05.18
申请号
KR20077006272
申请日期
2007.03.19
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
YOKOKAWA ISAO;NOTO NOBUHIKO;MITANI KIYOSHI
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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