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发明名称
Vakuumbearbeitungsvorrichtung
摘要
申请公布号
DE112005001539(T5)
申请公布日期
2007.05.16
申请号
DE200511001539
申请日期
2005.06.28
申请人
ULVAC INC.
发明人
TAKAHASHI, SEIICHI;MIYAYA, TAKEHISA;LIM, SOO BOO;SATOU, MASAYUKI;TSUTSUMI, KENGO;ONO, YOHEI
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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