Multi-stable electromechanical switches and methods of fabricating same

摘要

A multi-stable electromechanical switch having an open state and a closed state, the electromechanical switch comprising: a moveable member, at least one pair of receiving terminals biased to a bias position corresponding to the open state, wherein each terminal of the at least one pair of receiving terminals is configured to interface with the moveable member in the closed state; and an actuating circuit configured to provide electrostatic energy and to thereby displace the at least one pair of receiving terminals from the bias position, and to displace the moveable member toward the bias position; wherein the receiving terminals are further configured to return towards the bias position when the electrostatic energy is removed, and to thereby create an electrical connection with the moveable member, thereby retaining the electromechanical switch in the closed state.