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发明名称
Integrated Helix coil inductor on silicon and method of manufacturing
摘要
申请公布号
EP1132965(B1)
申请公布日期
2007.05.16
申请号
EP20010480021
申请日期
2001.03.05
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING PTE LTD.
发明人
SENG, YEOW KIAT;TAN, HAI PENG;MA, JIAN GUO;ANH, MANH;CHEW, KOK WAI
分类号
H01L27/08;H01L21/02;H01L23/64
主分类号
H01L27/08
代理机构
代理人
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