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发明名称
Schicht bildendes Apparat und Verfahren
摘要
申请公布号
DE60305605(T2)
申请公布日期
2007.05.16
申请号
DE20036005605T
申请日期
2003.09.17
申请人
ANELVA CORP.
发明人
KUMAGAI, AKIRA;ISHIBASHI, KEIJI;TANAKA, MASAHIKO
分类号
C23C16/452;C23C16/505;C23C16/44;C23C16/455;C23C16/509;H01J37/32;H01L21/20;H01L21/31;H01L21/316
主分类号
C23C16/452
代理机构
代理人
主权项
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