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发明名称
AN ENHANCED RESIST STRIP IN A DIELECTRIC ETCHER USING DOWNSTREAM PLASMA AND PLASMA APPARATUS USED THEREFOR
摘要
申请公布号
EP1269514(B1)
申请公布日期
2007.05.16
申请号
EP20010926387
申请日期
2001.03.16
申请人
LAM RESEARCH CORPORATION
发明人
MARKS, JEFFREY
分类号
H01J37/32;H05H1/46;G03F7/42;H01L21/3065;H01L21/311
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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