| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processor with which the history of processing is easily grasped and to provide an information storage device and an information storage method for storing the history of such a processing. SOLUTION: The processor is provided with a processor main body 101 having a plurality of processing parts to execute prescribed processing to a body W to be processed and a transportation device to transport the body to be processed among the individual processing parts, a first control part 103 to control the entire processor including the transportation device, a second control part 104 to control the plurality of processing parts, an information storage part 106 to fetch signals transferred between the first control part 103 and the second control part 104 and to store a plurality of kinds of information corresponding to the signals, and an information storage selection mechanism 107 to select the storage frequency of the information according to the kinds of information.</p> |
