| 摘要 |
<p>In order to provide a surface acoustic wave device provided with a pseudo-single crystal aluminum electrode film, having excellent power durability, easy to manufacture, and possible to grow with good reproducibility, a titanium buffer film 4 and an electrode film composed of an aluminum film or an aluminum alloy film are formed on a piezoelectric substrate 2 composed of lithium tantalate or lithium niobate. The electrode film 5 comprises a pseudo-single crystal film composed of two (111) domains (D1,D2). Each of the <111> directions of two (111) domains tilts in the range of 0 to 10 degrees (± 1 ,± 2 ) to the substrate surface, and the <11 - 2> directions in the respective (111) domain planes are 1 to 15 degrees (²) apart.</p> |
