<p>A transport (20) for conveying workpieces is connected to each of the work cells (10) attachable in the longitudinal direction. Each work cell has a rack (12) for carrying replaceable process modules (16) having a work device (22) with a process desktop (18) for treatment of the workpieces. The rack has at least one entrance 654(13a,13b) for receiving different types of process module carriers (14) for attachment of different process desktops.</p>
