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发明名称
WAFER CLAMPING SYSTEM OF SEMICONDUCTOR EQUIPMENT
摘要
申请公布号
KR20070050553(A)
申请公布日期
2007.05.16
申请号
KR20050107892
申请日期
2005.11.11
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
KWON, HYUNG BAE
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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