发明名称 Semiconductor device including fuse elements and bonding pad
摘要 A semiconductor device includes a lower-layer substrate, a fuse above the lower-layer substrate and blown by radiation with light, a silicon oxide film on the fuse and on an exposed portion of the surface of the lower-layer substrate, and a silicon nitride film on the silicon oxide film. The portion of the silicon oxide film on the surface of the lower-layer substrate is thicker than the fuse, and the silicon oxide film has an opening opposite the fuse.
申请公布号 US7217965(B2) 申请公布日期 2007.05.15
申请号 US20030732375 申请日期 2003.12.11
申请人 RENESAS TECHNOLOGY CORP. 发明人 FUJIKI NORIAKI;YAMASHITA TAKASHI;IZUMITANI JUNKO
分类号 H01L21/3205;H01L27/10;H01L21/768;H01L21/82;H01L23/52;H01L23/522;H01L23/525 主分类号 H01L21/3205
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