| 摘要 |
<p>Provided is a coating device, which can restrain the dye component agglomerate for the pigment dispersion type resist. The coating device provided by the invention is the apparatus to coat the pigment dispersion type resist liquid on the processed substrate, which includes: a nozzle, for disgorging the pigment dispersion type resist liquid; a coating fluid supplying part for providing the pigmentdispersion type resist liquid; and a piping for guiding the pigment dispersion type resist liquid provided by the coating fluid supplying part to the nuzzle made of conduit. Owing to the coating device of the invention having the above structure, the pigment dispersion type resist liquid passes through the conduit to restrain the agglomerate of the dye component.</p> |
