发明名称 |
Inkjet deposition apparatus and method with horizontal and vertical axes deviation correction |
摘要 |
In an inkjet deposition apparatus, a print head is translated in a transverse direction relative to a substrate and the deviation of the print head relative to a first alignment mark is measured. The inkjet head is then translated in a longitudinal direction relative to the substrate and the deviation of the print head to a further alignment mark is measured. A correction factor for a control unit for translation stage of the apparatus is then generated from the measured deviations.
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申请公布号 |
US7217438(B2) |
申请公布日期 |
2007.05.15 |
申请号 |
US20030475293 |
申请日期 |
2003.12.23 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
NEWSOME CHRISTOPHER;KAWASE TAKEO |
分类号 |
B05D1/12;B41J2/01;B05C5/00;B05D1/26;B05D3/00;B05D5/06;B41J29/393;H01L51/50;H05B33/10 |
主分类号 |
B05D1/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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