发明名称 Inkjet deposition apparatus and method with horizontal and vertical axes deviation correction
摘要 In an inkjet deposition apparatus, a print head is translated in a transverse direction relative to a substrate and the deviation of the print head relative to a first alignment mark is measured. The inkjet head is then translated in a longitudinal direction relative to the substrate and the deviation of the print head to a further alignment mark is measured. A correction factor for a control unit for translation stage of the apparatus is then generated from the measured deviations.
申请公布号 US7217438(B2) 申请公布日期 2007.05.15
申请号 US20030475293 申请日期 2003.12.23
申请人 SEIKO EPSON CORPORATION 发明人 NEWSOME CHRISTOPHER;KAWASE TAKEO
分类号 B05D1/12;B41J2/01;B05C5/00;B05D1/26;B05D3/00;B05D5/06;B41J29/393;H01L51/50;H05B33/10 主分类号 B05D1/12
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