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发明名称
PAD CONDITIONER FOR CHEMICAL MECHANICAL POLISHING EQUIPMENT
摘要
申请公布号
KR20070050109(A)
申请公布日期
2007.05.15
申请号
KR20050107261
申请日期
2005.11.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JANG, YOUNG SEOK;RYU, CHANG GIL;KU, JA HYUN;LEE, JAE CHANG;NAM, KYOUNG JIN
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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