发明名称 Optical control interface between controller and process chamber
摘要 The present invention relates to interfacing new sensors to incumbent controls. In particular, it relates to optically interfacing a new sensor, such as a spectrometer with plasma generator, to an incumbent electro-optical sensor. Logic and resources to control activation of the incumbent electro-optical sensor may be included. Particular aspects of the present invention are described in the claims, specification and drawings.
申请公布号 US7217371(B2) 申请公布日期 2007.05.15
申请号 US20040898891 申请日期 2004.07.26
申请人 LIGHTWIND CORPORATION 发明人 LITVAK HERBERT E.
分类号 G01R31/00;G01N21/00;G01N21/68;H01J37/32 主分类号 G01R31/00
代理机构 代理人
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