发明名称 Micro-positioning device
摘要 A micro-positioning device adapted for displacement in a direction of travel. The device has a frame, an actuator attached to the frame, and a hydraulic booster attached to the frame and operably connected to the actuator. The actuator is adapted for activation and de-activation in sequence to achieve a displacement in the direction of travel. The hydraulic booster is adapted for amplifying or de-amplifying displacement in the direction of travel. The hydraulic booster converts mechanical energy into hydraulic energy and converts hydraulic energy into mechanical energy to modify the displacement.
申请公布号 US7218035(B2) 申请公布日期 2007.05.15
申请号 US20050529007 申请日期 2005.03.24
申请人 UNIVERSITY OF WATERLOO 发明人 KHAJEPOUR AMIR;MORRIS KIRSTEN;BEHJAT SARA
分类号 H01L41/08;H01L41/09 主分类号 H01L41/08
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