| 摘要 |
A meso-electromechanical system ( 900, 1100 ) includes a substrate ( 215 ), a standoff ( 405, 1160 ) disposed on a surface of the substrate, a first electrostatic pattern ( 205, 1105, 1110, 1115, 1120 ) disposed on the surface of the substrate, and a glass beam ( 810 ). The glass beam ( 810 ) has a fixed region ( 820 ) attached to the standoff and has a second electrostatic pattern ( 815, 1205, 1210, 1215, 1220 ) on a cantilevered location of the glass beam. The second electrostatic pattern is substantially co-extensive with and parallel to the first electrostatic pattern. The second electrostatic pattern has a relaxed separation ( 925 ) from the first electrostatic pattern when the first and second electrostatic patterns are in a non-energized state. In some embodiments, a mirror is formed by the electrostatic materials that form the second electrostatic pattern. The glass beam may be patterned using sandblasting ( 140 ).
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