ELEKTRONENSTRAHL-LITHOGRAPHYSYSTEM MIT ZIEL- VERRIEGELUNGSVORRICHTUNG,申请号AT20000105794T-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	ELEKTRONENSTRAHL-LITHOGRAPHYSYSTEM MIT ZIEL- VERRIEGELUNGSVORRICHTUNG
摘要
申请公布号	AT361547(T)	申请公布日期	2007.05.15
申请号	AT20000105794T	申请日期	2000.03.18
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	HARTLEY, JOHN G.;KENDALL, RODNEY A.
分类号	G03F7/20;G01J1/00;G03F9/02;H01J37/141;H01J37/21;H01J37/30;H01J37/304;H01J37/305;H01L21/027;(IPC1-7):H01J37/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR

FILTER MEMBER MANUFACTURING METHOD, FILTER MEMBER CUTTING METHOD, FILTER CHIP CUTTING METHOD, AND FILTER CHIP MANUFACTURING METHOD

AN IMPROVED OPTICAL DEVICE HAVING CONTINUOUS AND DISPERSE PHASES

METHOD, ARRANGEMENT AND COMPUTER PROGRAM FOR PROVIDING A NETWORK SERVICE AND USER INTERFACE

CHEMICAL ANALYSIS METHOD FOR MULTIPLEXED SAMPLES

CLOSURE MEASURING SYSTEM

METHOD AND APPARATUS FOR REVOCATION LIST MANAGEMENT USING A CONTACT LIST HAVING A CONTACT COUNT FIELD

DEVICE FOR DETERMINING AND/OR MONITORING THE VISCOSITY OF A MEDIUM IN A CONTAINER

METHOD AND APPARATUS FOR SCREENING OF POLYCONDENSATION CATALYSTS

Modularer Bearbeitungskopf

Aluminiumschmelzofen, insbesondere zum Umschmelzen von Aluminiumschrott

Method and device for capture of operating data for a production plant in which a data processing component is integrated into operating application programs so that production can be monitored from an application program

DUAL-SPRING COMPENSATOR ASSEMBLY FOR A FUEL INJECTOR AND METHOD

AIR INTAKE TUBE FOR AN INTERNAL COMBUSTION ENGINE

MODEL SYSTEM FOR THE VIVO STUDY OF APOPTOSIS

DEVICE FOR HYBRIDIZING SAMPLES ON ARRAYS OF BIOLOGICAL SUBSTANCES

WAR GAME COMPLEX AND METHOD OF PLAYING THE GAME

DRIVE APPARATUS