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发明名称
APPARATUS FOR TREATING SUBSTRATES
摘要
申请公布号
KR20070050324(A)
申请公布日期
2007.05.15
申请号
KR20050107756
申请日期
2005.11.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, SUNG HAN
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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