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发明名称
INTEGRIERTER PUFFERRAUM, ABGABE- UND LAGERSYSTEM
摘要
申请公布号
AT361551(T)
申请公布日期
2007.05.15
申请号
AT19980912061T
申请日期
1998.03.26
申请人
ASYST TECHNOLOGIES, INC.
发明人
FOSNIGHT, WILLIAM, J.
分类号
B65G1/00;B65G49/07;H01L21/00;H01L21/677;(IPC1-7):H01L21/677
主分类号
B65G1/00
代理机构
代理人
主权项
地址
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