发明名称 Divided drain implant for improved CMOS ESD performance
摘要 A divided drain implant structure for transistors used for electrostatic discharge protection is disclosed. At least two transistors are formed close to each other on a substrate with their gates and sources coupled together and with the drains placed next to each other and separated as a divided drain implant structure. The divided drain implant structure further comprises at least two drain implant regions separated by a lightly doped drain region and a halo implant region formed underneath. At least one of the drain implant regions is coupled to an input/output pad of a circuit.
申请公布号 US7217984(B2) 申请公布日期 2007.05.15
申请号 US20050156063 申请日期 2005.06.17
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 HUANG SHAO-CHANG;CHU YU-HUNG
分类号 H01L21/8234;H01L21/8238 主分类号 H01L21/8234
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