发明名称 |
Metallic nanowire interconnections for integrated circuit fabrication |
摘要 |
A method for fabricating an electrical interconnect between two or more electrical components. A conductive layer is provided on a substarte and a thin, patterned catalyst array is deposited on an exposed surface of the conductive layer. A gas or vapor of a metallic precursor of a metal nanowire (MeNW) is provided around the catalyst array, and MeNWs grow between the conductive layer and the catalyst array. The catalyst array and a portion of each of the MeNWs are removed to provide exposed ends of the MeNWs.
|
申请公布号 |
US7217650(B1) |
申请公布日期 |
2007.05.15 |
申请号 |
US20040816576 |
申请日期 |
2004.03.24 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION (NASA) |
发明人 |
NG HOU TEE;LI JUN;MEYYAPPAN MEYYA |
分类号 |
H01L21/4763 |
主分类号 |
H01L21/4763 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|