WAFER GUIDE OF APPARATUS CLEANING SEMICONDUCTOR WAFERS,申请号KR20050106611-传众专利搜索

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发明名称	WAFER GUIDE OF APPARATUS CLEANING SEMICONDUCTOR WAFERS
摘要
申请公布号	KR20070049456(A)	申请公布日期	2007.05.11
申请号	KR20050106611	申请日期	2005.11.08
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	CHOI, SU HYUN;PARK, KI HWAN;CHO, DONG WOOK
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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