| 摘要 |
<p>A temperature control system for a semiconductor manufacturing process is disclosed, which can maximize the energy use efficiency by constructing low-temperature and high-temperature phase change materials (PCMs) as separate energy sources, storing and converting cold heat storage and thermal storage energy, and then using the converted storage energy for the semiconductor manufacturing process. The temperature control system includes a coolant loop part, composed of a plate-type heat exchanger, a distribution valve, and a mixing agitator, for adjusting process temperature of the semiconductor manufacturing process by circulating coolant and supplying the circulated coolant to semiconductor equipment; and a refrigerator loop part, including a refrigerator, low-temperature and high- temperature PCM tanks accommodating low-temperature and high- temperature PCMs, respectively, and a PCM heat exchanger. The coolant in the coolant loop part flows into the mixing agitator through the PCM heat exchanger by switching of the distribution valve, and the coolant in the refrigerator loop part circulates to the refrigerator through the plate-type heat exchanger.</p> |
