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发明名称
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
摘要
申请公布号
KR20070049671(A)
申请公布日期
2007.05.11
申请号
KR20077006120
申请日期
2007.03.16
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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ULTRASONOGRAPH, ULTRASONIC TRANSDUCER, EXAMINING INSTRUMENT, AND ULTRASONOGRAPHING DEVICE
