| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processor which can prevent the contamination of the bottom face of a substrate due to a negative pressure caused on the bottom face during applying a dry treatment to the substrate by turning it at a high speed. SOLUTION: The spin processor comprises a body of rotation 12 which is arranged inside a cup body 1, and is rotated while holding the substrate; a nozzle head 46 which is arranged at a position opposite to the bottom face of the substrate held by the body of rotation and is formed with a recess portion 51 which is opened upward; nozzle 55 for a lower part treatment liquid which injects a treatment liquid against the bottom face of the substrate held by the body of rotation; a turbulent flow prevention cover 66 which covers the top face of the body of rotation, is formed with an opening 68 for introducing the treatment liquid dropping from the bottom face of the substrate into the recess portion, and prevents the occurrence of a turbulent flow on the top face of the body of rotation during rotation; a drainage pipe 54 which has its one end connected to the concave portion, and drains the treatment liquid which has flowed into the concave portion; and a gas-liquid separation tub which prevents the occurrence of an ascending air current inside the drainage pipe when the bottom face side of the substrate becomes a negative pressure, while the substrate is treated with the treatment liquid and then is turned at a high speed to be dry-treated. COPYRIGHT: (C)2007,JPO&INPIT
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