| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of observing highly sensitively a surface shape of a sample having a high aspect ratio of irregularity, and capable of detecting an electric characteristic of the sample. SOLUTION: This probe 20 is provided with a probe stylus 21 with a tip part 21a sharpened and with an end part 21b formed substantially rodlikely, having conductivity, and scanned on the sample, a cantilever 22 with the probe stylus 21 provided projectedly toward a tip part 22a, and arranged with a wire 29 connected electrically to the probe stylus 21, and a main body part 23 for fixing overhangingly a base end part 22b of the cantilever 22 to bring the tip part 22a into a free end. A cross-sectional shape of the end part 21b of the probe stylus 21 is a substantial C-shape having a hollow part 30, and is substantially symmetric with respect to the center axis 22d of the probe 22. COPYRIGHT: (C)2007,JPO&INPIT
|
