| 摘要 |
PROBLEM TO BE SOLVED: To provide a detecting system capable of easily detecting any load collapse when unpacking a laminate and separating a substrate therefrom. SOLUTION: The detecting system 1 has a laminate 7, and a substrate transferring device 9 for separating a substrate 3 from the laminate 7 is provided above the laminate 7. Contact type sensors 11a, 11b, 11c and 11d are provided at four corners of a frame 23 of the substrate transferring device 9. When separating the substrate 3 from the laminate 7, the substrate transferring device 9 is lowered, and it is determined that no load collapse is present if all sensors are reacted when the substrate transferring device is further lowered by a predetermined distance after one of sensors is reacted. It is determined that the load collapse is present if one of the sensors is not reacted, and work is stopped. COPYRIGHT: (C)2007,JPO&INPIT
|
