发明名称 Electrostatic mems components permitting a large vertical displacement
摘要 An electrostatic actuation device, including a flexible electrode, having a first and a second end, at least part of the flexible electrode being mobile relative to a substrate, two electrodes fixed relative to the substrate, and a mechanism for forming two pivots of the flexible electrode, located between the two ends of the flexible electrode.
申请公布号 US2007103843(A1) 申请公布日期 2007.05.10
申请号 US20040583718 申请日期 2004.12.23
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENT. 发明人 CHARTON JULIEN;DIVOUX CLAIRE
分类号 H01T23/00;H02N1/00 主分类号 H01T23/00
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