发明名称 DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS AND METHOD FOR ITS USE
摘要 Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, an optional secondary solvent and less than about 3 wt.% water and/or a dryness coefficient of at least about 1. Methods for the preparation and use of the improved dry stripping solutions are additionally provided.
申请公布号 WO2007053363(A2) 申请公布日期 2007.05.10
申请号 WO2006US41394 申请日期 2006.10.24
申请人 DYNALOY, LLC;PHENIS, MICHAEL, T.;KIRKPATRICK, LAURI, KIRBY;CHAN, RAYMOND;SCHEELE, DIANE, MARIE;POLLARD, KIMBERLY, DONA 发明人 PHENIS, MICHAEL, T.;KIRKPATRICK, LAURI, KIRBY;CHAN, RAYMOND;SCHEELE, DIANE, MARIE;POLLARD, KIMBERLY, DONA
分类号 C11D7/32 主分类号 C11D7/32
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