| 摘要 |
The present invention enables measurement of the configuration of a pattern with irregularity in a wide surface region with a high accuracy and in a single operation by using an apparatus having relatively simple construction. The surface inspecting method for inspecting a surface condition a measurement objective region to be measured, which comprises a periodic irregular pattern with a period, by irradiating the measurement objective region with an illuminating light of an approximately parallel beam, comprising: a first step of irradiating a measurement objective region with an illuminating light in an oblique direction thereto; a second step of forming an image of reflected light from the measurement objective region by one system selected from the group consisting of an object-side telecentric optical system and an image-object-side telecentric optical system, which has an optical axis coinciding with an incident direction of the illuminating light to the measurement objective region, the formed image of reflected light having points with luminance corresponding to the incident angle of the illuminating light at respective points on the measurement objective region; a third step of picking up the formed image to collect luminance data of respective points in the measurement objective region; a fourth step of analyzing spatial frequencies of the luminance data with respect to positions in a desired direction to make a plurality
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