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发明名称
METAL-GATE STAPEL MIT EINER VERBESSERTEN ÄTZSTOPSCHICHT DURCH IONIMPLANTATION VON METALATOMEN UND VERFAHREN ZU DESSEN HERSTELLUNG
摘要
申请公布号
DE60211318(T2)
申请公布日期
2007.05.10
申请号
DE2002611318T
申请日期
2002.02.06
申请人
ADVANCED MICRO DEVICES INC.
发明人
BESSER, R.;DAKSHINA-MURTHY, SRIKANTESWARA
分类号
H01L21/28;H01L29/423;H01L29/49;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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