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发明名称
300MM MICROENVIRONMENT POD WITH DOOR ON SIDE
摘要
申请公布号
HK1017325(A1)
申请公布日期
2002.01.18
申请号
HK19980113815
申请日期
1998.12.17
申请人
EMPAK, INC.
发明人
GREGERSON, BARRY;WISEMAN, BRIAN;GALLAGHER, GARY
分类号
B65D85/48;B65D;G11B33/04;G11B33/14;H01L21/673;H01L21/677;(IPC1-7):B65D
主分类号
B65D85/48
代理机构
代理人
主权项
地址
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