| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam interference optical system, using an electron beam bi-prism capable of independently controlling width W of interference area and distance s between interference fringes as important parameters for an interferometer and an interference microscope image obtained from each other, made to have freedom at relative magnification of a sample image and an image of an electron bi-prism filament electrode. SOLUTION: Two electron beam bi-prisms are used in two steps in light axis direction, and an optical system of two-stepped electron beam bi-prism interferometer is adopted. An object lens is constituted in two steps by combining two lenses, and it is made possible to optionally set relative magnification of a sample image and an image of an electron bi-prism filament electrode, by controlling focal lengths of respective object lenses independently. COPYRIGHT: (C)2007,JPO&INPIT
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