| 摘要 |
PROBLEM TO BE SOLVED: To prevent dust below the opening in the bottom of a pyramidal collet from being deposited on a semiconductor chip when the semiconductor chip is sucked by the pyramidal collet. SOLUTION: The pyramidal collet 100 is provided with a body 10 in the shape of a hollow pyramid whose top 11 and bottom 12 are both open, and picks up the semiconductor chip 200 by its suction force which is generated at its opening 12a on the side of the bottom 12 when air is sucked up from its openings 11a on the side of the top 11. A plurality of openings 11a are arranged in parallel on the side of the top 11 of the body 10 in face of the opening 12a on the side of the bottom 12. The plurality of openings 11a constitute a laminar flow generating means 20 which makes a laminar flow of gas vertically directed from below the opening 12a on the side of the bottom 12 when the suction force is generated. COPYRIGHT: (C)2007,JPO&INPIT |
