| 摘要 |
PROBLEM TO BE SOLVED: To provide a biosensor equipped with a detection element array with less variation in its detection element output. SOLUTION: In this biosensor equipped with semiconductor Hall elements for detecting a magnetic field, Hall elements S for measurement are disposed in a two-dimensional array shape while dummy elements D are disposed so as to surround the periphery of the Hall element array for measurement. In this way, by disposing the dummy elements in the outermost portions of rows and columns likely to cause variations in well domain widths, gate electrode lengths, insulation film thicknesses, etc., in a manufacturing process, variations in the Hall elements for measurement are suppressed, making it possible to suppress variations in detection results. COPYRIGHT: (C)2007,JPO&INPIT
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