| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet delivering head which can secure a delivering performance for liquid droplets by suppressing a passage resistance not to be high even when delivering chambers are formed densely, and to provide its manufacturing method, and a liquid droplet delivering apparatus with a high printing performance and the like equipped with the liquid droplet delivering head. SOLUTION: A nozzle substrate 5, a reservoir substrate 4, a cavity substrate 3 and an electrode substrate 2 are joined into a four-layer structure. The reservoir substrate 4 exclusive for a reservoir is prepared. A recess 13a for the reservoir to be a reservoir 13 which supplies liquid droplets to a first cavity 12 provided in the cavity substrate 3, and a recess for a supplying port which supplies the liquid droplets in the reservoir 13 to the first cavity 12 are formed on the same face side of the reservoir substrate 4. Moreover, a nozzle communication hole 16 which conveys the liquid droplets from the first cavity to a nozzle hole 17 is formed penetrating the reservoir substrate 4. COPYRIGHT: (C)2007,JPO&INPIT
|
