| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide substrate treatment equipment suppressing an eddy current flowing through a soaking pipe fitted between an electrode for applying a high frequency and a heater for a heating, and being capable of effectively converting a charged high-frequency power to a plasma. <P>SOLUTION: The substrate treatment equipment has a treating pipe 2 forming a space housing a substrate, the soaking pipe 16 arranged so as to coat the treating pipe 2 from the outside, and a heating means 4 arranged around the soaking pipe 16. The substrate treatment equipment further has a pair of the electrodes 6 and 7 arranged in the space between the treating pipe 2 and the soaking pipe 16 for receiving the application of the high-frequency power. Irregularities are formed to a surface on at least the electrode side of the soaking pipe 16. <P>COPYRIGHT: (C)2007,JPO&INPIT |
