| 摘要 |
PROBLEM TO BE SOLVED: To inhibit heat received by a diaphragm for pressure reception from conducting to a sensor chip via a pressure transmission member as to a pressure sensor for performing pressure detection by transmitting a pressure received by the diaphragm to the sensor chip via the transmission member. SOLUTION: The diaphragm 10 for pressure reception is provided on the one-end part side of a hollow-cylindrical metallic case 20 while the sensor chip 40 is provided on the other-end part side. The pressure transmission member 50 is provided in a hollow part of the metallic case 20. A heat pipe 60 as a heat radiation means is connected to the metallic case 20 on the periphery of the sensor chip 40 in the other end part thereof. Heat proceeding to the sensor chip 40, via the diaphragm 10 and transmission member 50, is radiated by this heat pipe 60. COPYRIGHT: (C)2007,JPO&INPIT
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